・ High thermal conductivity, high thermal reflectance, and high soaking.
・ High thermal shock resistance and can endure rapid heating and quenching.
・ Low thermal expansion that matched with Silicon. It prevents transformation of the wafer by temperature change and
reduce particle generation due to exfoliation of deposited film.
・ Superior corrosion proof against fluorine-containing gas
・ Parts for the compound semiconductor equipment
・Semiconductor equipment (CDV,etching etc)
Susceptor, electrostatic check, heater soaking board
Vacuum check, heater
・ Dummy wafer
We are available to process parts for semiconductor equipment.